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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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10.2K Views

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11:44 min

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August 15th, 2014

DOI :

10.3791/51251-v

August 15th, 2014

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Joshua Small¹, Adam Fruehling², Anurag Garg³, Xiaoguang Liu¹, Dimitrios Peroulis³

¹Department of Electrical and Computer Engineering, University of California, Davis, ²Digital Light Projection (DLP) Technology Development, Texas Instruments, ³Birck Nanotechnology Center and the Department of Electrical and Computer Engineering, Purdue University

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Real time DC dynamic Biasing

Switching Time Improvement

Underdamped Fringing field Electrostatic MEMS Actuators

Fast Switching Operation

Settling Time

Transient Applied Bias Waveforms

Mechanical Quality Factor

Experimental Validation

Switching Time Improvement

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0:05

Title

1:08

Fabrication of Electrostatic Fringing-field Actuated (EFFA) MEMS Fixed-fixed Beams

8:28

Experimental Validation of Dynamic Waveform Biasing

10:23

Results: Measured Pull-down and Released States of a MEMS Bridge

11:16

Conclusion

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